Plasma Processing of Materials: Scientific Opportunities and Technological Challenges

Washington, DC: National Academy Press, 1991. First? Edition. First? Printing. 75, wraps, illus. Condition: very good.

Keywords: Plasma Processing, Plasma Deposition, Plasma Reactor, Plasma Science, Electronics, Plasma Diagnostics, Microelectronics, Chemical Kinetics, Technology

ISBN: 0309045975

[Book #46479]

Price: $45.00