Report of the Second Workshop on Synchrotron Radiation Sources For X-Ray Lithography; Held at Brookhaven National Laboratory August 25-27, 1986 BNL 38789
Upton, NY: Brookhaven National Laboratory Associated Universities, Inc., 1986. Presumed First Edition, First printing. Tape binding. [2], ii-iii, 10, xxxcii, [1] pages. Informal Report. Oversized book, measuring 11 inches by 8-1/2 Includes Executive Summary and Recommendations; Background; Need for Synchrotron Radiation; International Competition; Technical Feasibility of X-ray Lithography; Synchrotron Performance Specifications; Synchrotron Construction Options; Recommendations; and Near-term Plan. Also includes four Appendices: Agenda; List of Attendees; Conventional Magnet Storage Rings for X-ray Lithography; and Overview of a Complete Lithography Program. The initiative and momentum behind the effort to coordinate a US based program for the source for X-ray lithography continued at this second workshop. Designs for three storage rings meeting the specifications established at the March workshop were presented and evaluated. In order not to miss the "window of opportunity" for implementing a US based X-ray lithography program, a pilot manufacturing plant including an X-ray lithography program, a pilot manufacturing plant including an X-ray source and full wafer processing facilities must begin construction immediately to be ready for operation in 1990.
The initiative and momentum behind the effort to coordinate a US based program for the source for X-ray lithography continued at this second workshop. Designs for three storage rings (one superconducting and two conventional) meeting the specifications established at the March workshop were presented and evaluated. Several R&D and other items relating to synchrotron radiation sources and their application to lithography were discussed. More importantly, however, the workshop identified the next phases necessary if this effort is to succeed. In order not to miss the "window of opportunity" for implementing a US based Xray lithography program, a pilot manufacturing plant including an X-ray source and full wafer processing facilities must begin construction immediately to be ready for operation in 1990. This pilot plant would have the X-ray source based on conventional technology as discussed in the workshop, and a high energy injector. On this prototype, studies of lower energy injection would be made so that cost-effective copies of the source could then be manufactured for distribution to semiconductor manufacturing companies. In addition, a program to construct and evaluate the superconducting machine discussed at the workshop should proceed in parallel with the other efforts. It is possible that such machines
may ultimately prove to be the X-ray sources of choice. A small planning workshop to identify the cost and manpower required to implement the described program within the required time-scale should be held as soon as possible. It should be noted that, in the interim between now and the implementation of this program, some lithography effort can proceed at NSLS at Brookhaven, SSRL at Stanford, and SRC at the University of Wisconsin. Condition: Very good.
Keywords: Radiation Sources, X-Ray Lithography, Magnet Storage, Storage Ring, Synchrotron, Micron Lithography, Workshops, Proceedings, National Synchrotron Light Source
[Book #79943]
Price: $85.00