Report of the Workshop on Transferring X-Ray Lithography Synchrotron (XLS) Technology to Industry. Held at Brookhaven National Laboratory, July 8, 1987. Sponsored by Office of Research and Technology Applications and the National Synchrotron Light Source ; BNL 52096

Upton, Long Island, New York: Brookhaven National Laboratory, 1987. Presumed First Edition, First printing. Tape binding. 31 pages. Includes Executive Summary, as well as chapters on Background; Objectives; Objective of XLX Effort; Objective of Preconstruction Study; Objective of the Technology Transfer Workshop; Presentations; Introduction; Preconstruction Study Description, Goals and Objectives; XLS Technology; Lessons Learned in Transferring Technology From Government to Industry; Technology Transfer Scenarios; Discussion; Recommendations and Conclusions; and Conclusions. Also includes four Appendices on Agenda, Preconstruction Study Viewgraphs; Technology Transfer Model Viewgraphs; and Attendees. X-ray lithography, is a process used in electronic industry to selectively remove parts of a thin film. It uses X-rays to transfer a geometric pattern from a mask to a light-sensitive chemical photoresist, or simply "resist," on the substrate. A series of chemical treatments then engraves the produced pattern into the material underneath the photoresist. The objective of the XLS effort is that within a 30 to 36 month period, several U.S. companies will be able to offer the semiconductor industry proven, reliable, and effective sources for x-ray lithography. These sources must be competitive with those that will become available from foreign suppliers both in performance and in cost. Brookhaven National Laboratory (BNL) is a United States Department of Energy national laboratory located in Upton, New York, on Long Island, and was formally established in 1947 at the site of Camp Upton, a former U.S. Army base. Its name stems from its location within the Town of Brookhaven, approximately 60 miles east of New York City. It is managed by Stony Brook University and Battelle Memorial Institute.

Research at BNL specializes in nuclear and high energy physics, energy science and technology, environmental and bioscience, nanoscience and national security. The 5,300 acre campus contains several large research facilities, including the Relativistic Heavy Ion Collider and National Synchrotron Light Source II. Seven Nobel prizes have been awarded for work conducted at Brookhaven lab. Following World War II, the US Atomic Energy Commission was created to support government-sponsored peacetime research on atomic energy. The effort to build a nuclear reactor in the American northeast was fostered largely by physicists Isidor Isaac Rabi and Norman Foster Ramsey Jr., who during the war witnessed many of their colleagues at Columbia University leave for new remote research sites following the departure of the Manhattan Project from its campus. Their effort to house this reactor near New York City was rivaled by a similar effort at the Massachusetts Institute of Technology to have a facility near Boston. Involvement was quickly solicited from representatives of northeastern universities to the south and west of New York City such that this city would be at their geographic center. In March 1946 a nonprofit corporation was established that consisted of representatives from nine major research universities — Columbia, Cornell, Harvard, Johns Hopkins, MIT, Princeton, University of Pennsylvania, University of Rochester, and Yale University.

Out of 17 considered sites in the Boston-Washington corridor, Camp Upton on Long Island was eventually chosen as the most suitable in consideration of space, transportation, and availability. The camp had been a training center from the US Army during both World War I and World War II. After the latter war, Camp Upton was deemed no longer necessary and became available for reuse. A plan was conceived to convert the military camp into a research facility.

On March 21, 1947, the Camp Upton site was officially transferred from the U.S. War Department to the new U.S. Atomic Energy Commission (AEC), predecessor to the U.S. Department of Energy (DOE).
Condition: Very good.

Keywords: X-Ray Lithography, Synchrotron, Technology Transfer, XLS, Workshop, Research and Development, Science and Technology, Superconducting, Richard Heese, Facility Design

[Book #79946]

Price: $65.00

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